MEMS refers to a batch of micro-devices or systems that integrate micro-mechanisms, micro-sensors, micro-actuators, signal processing and control circuits, interfaces, communications and power supplies into one or more chips.
The sensor made by MEMS technology has the characteristics of miniaturization, integration, low cost, high efficiency and mass production. At the same time, the MEMS sensor can not only sense the measured parameters, but also convert them into signals for easy measurement. And the signal can be analyzed, processed, identified and judged, so the image is called intelligent sensor.
What are the advantages of MEMS sensors?
Because the traditional sensors and actuators based on electromechanical technology cannot meet the needs of industrial, consumer electronics and other fields in terms of volume, price and capacity, MEMS began to develop.
Compared with traditional sensors, MEMS sensors have obvious advantages in size, performance, intelligence and so on. For example, in gyroscopes and microphones, the application of MEMS technology has brought about a big leap forward in technological upgrading.
Comparison 1: Gyroscopes. Traditional fiber-optic gyroscopes, though increasingly small, are impossible to fit into some electronic devices. And in order to ensure performance, such a gyroscope production is low and high price can be imagined.ER-MG2-50/100, a high performance MEMS gyro sensor with 0.01-0.02°/hr bias instability and 0.0025-0.005°/√hr Angular Random Walk, is specially designed for north seeking, pointing, initial alignment in logging tools/gyro tools, mining/drilling equipment, weapon/UAV launch systems, satellite antenna,target tracking system and so on. Thanks to the high performance, it can also used in high precision attitude measuring, stabilization control, positioning, navigating in navigation grade MEMS IMU/ INS, Land surveying/land mobile mapping system, railway train system, etc. So ER-MG2-50/100 is a best, cost effective, robust, reliable, small size, light weight, low power alternative of medium-low navigation grade FOG DTG with north seeking, precision attitude measuring , inertial positioning and navigation function.
The gyroscopes we use on smartphones today are MEMS gyroscopes, such as the one above. Its small size, low power consumption, easy to digital and intelligent, especially low cost, easy to mass production, very suitable for mobile phones, automotive traction control systems, medical equipment such as the need for mass production of equipment.
Comparison 2: Microphone. The seven or eight mechanical components of a conventional microphone can all be integrated into a small MEMS sensor chip. As you can see from the picture above, the MEMS microphone is very small and light in size.
Because is the chip manufacture, the consistency is good, the power consumption is low, is easier to mass produce. MEMS sensors have emerged to meet the requirements of small size and high performance of specific products.
The whole MEMS industry chain:
The whole MEMS industry chain is relatively complex, involving a large number of manufacturers. The upstream of the industry chain is responsible for MEMS device design, materials and production equipment supply, the midstream produces MEMS devices, and the downstream uses MEMS devices to manufacture terminal electronic products.
China's design, manufacturing, packaging and testing manufacturers have already begun to actively layout, has formed a complete MEMS industry chain. Its design industry is mainly distributed in the Bohai Rim and Yangtze River Delta region. Manufacturing lines are mainly concentrated in Beijing, Shanghai, Wuxi, Hangzhou, Suzhou, Zibo and other cities.
MEMS sensor development trend
Previously, smart hardware such as smartphones and wearable devices were rapidly updated, with more functions and smaller sizes. As a result, the size of the device is extremely high, which promotes the development of MEMS sensors towards integration, miniaturization, intelligence and low power consumption. With the deepening of application, the development of MEMS has a new trend.
More Technical Questions
1.Accelerometer Technical Information
2.Background and Development Status of MEMS Inertial Sensors
3.Analysis of Typical Applications of MEMS Sensors
4.How to Distinguish MEMS Accelerometer and MEMS Gyroscope Correctly?
5.The Role of MEMS Accelerometers in Inertial Navigation
6.MEMS gyroscopes, accelerometers and magnetometers
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