Ultra High Precision MEMS Accelerometer

ER-MA-6
1. Large range, ultra-high precision, high reliability and low power consumption;
2. Class II Non-linearity: <10µg/g2;
3. Bias Stability (10s smooth): <5ug;
4. Bias instability (Allen Curve): <2ug.

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Introduction

ER-MA-6 Ultra High Precision MEMS Accelerometer

Introduction
MEMS (MICro EleCTRo Mechanical Systems) accelerometers are accelerometers manufactured using MEMS technology. Due to the use of micro-electromechanical system technology, its size is greatly reduced, and a MEMS accelerometer is only a fraction of the size of a fingernail. MEMS accelerometers have the advantages of small size, light weight, and low energy consumption.
ER-MA-6 is an inertial sensor that can measure linear acceleration caused by gravity. This product is a MEMS accelerometer with a large range, ultra-high precision, high reliability and low power consumption.

Features
Large range, ultra-high precision, high reliability and low power consumption
Class II Non-linearity: <10µg/g2
Bias Stability (1s smooth) (1σ): <15ug
Bias Stability (10s smooth): <5ug
Bias instability (Allen Curve): <2ug

Applications
Inertial measurement: inertial guidance, overload measurement, integrated navigation
Tilt measurement: antenna attitude, platform measurement, tilt angle test
Vibration measurement: mechanical equipment, bridges and dams, safety tests

Specifications

Parameters	Accelerometer	Unit
Product model	ER-MA-6
Encapsulation	CLCC48
Axis	Y
Range	60	g
Factor Scale Non-linearity	<500ppm	ppm（IEEE Norm, of full scale）
Bandwidth（adjustable）3db	>150	Hz
Group delay	<3	ms
Class II Non-linearity	<10	µg/g2
Noise	<30	µg/√Hz @1hz
Threshold value	<30	µg
Factory Bias(room temp)	<±1	mg(Room temperature calibration value)
Factory Bias temp drift	<±0.5	mg
Factory Bias Temp Hysteresis	<0.2	mg
Bias after compensation	<±0.15	mg
Bias Stability (1s smooth) (1σ)	<15	ug
Bias Stability (10s smooth)	<5	ug
Bias instability (Allen Curve)	<2	ug
Bias Month Repeatability	<±0.03	mg
Repeatability 1σ	<10	ug
Scale Factor	20000000	lsb/g(Room temperature calibration value)
Scale Factor Month Repeatability	<±20	ppm
Scale Temp Coefficient	<40	ppm/°C
Scale factor after conpensation	<100	ppm
Start Time	<500	ms
Sample Frequency(adjustable)	>10K	Hz
Shock(charged)	300	g
Shock(uncharged)	300	g
Vibration	18	g
Operate Temp	-40~+85	°C
Supply Voltage	5±0.25	V
Current	<30	ma
Interface	SPI