High Accuracy MEMS Accelerometer

ER-MA-5 (Alternative of MS1000):
1. Bias instability (Allen Curve) 5 μg;
2. Bias stability (1s Standard Deviation)(1σ)<20μg;
3. Bias month repeatability 100μg.

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Introduction

ER-MA-5 High Accuracy MEMS Accelerometer (Alternative of MS1000)

Accelerometer is an inertial sensor, which can measure the linear acceleration due to gravity. MEMS accelerometer has the characteristics of small volume, light weight and low energy consumption that can be widely used in vibration detection, attitude control, security alarm, consumer applications, motion recognition and status recording. Accelerometers are combined with gyroscopes and magnetometers to create IMU (inertial measurement units).

Applications

Inertial measurement: inertial guidance, overload measurement, combined navigation
Tilt measurement: antenna attitude, platform measurement, dip test
Vibration measurement: mechanical equipment, bridge dam, safety test

Specifications

Axis	X	X	X	X	X	X	Unit
Range	2	10	30	50	100	200	g
Bandwidth	100	100	100	100	100	100	Hz
Bias Stability (Allen)	<5	10	10	<10	<20	<30	μg
Bias Stability (10s ) (1σ)	<20	<50	<50	<50	<100	<150	μg
Bias Month repeatability	100	100	100	500	1000	1000	μg
Bias Temp Coefficient	<10	<10	<20	<50	<100	<200	μg/℃
Bias Temp Hysteresis	<0.5	<1	<1.5	<2	<3	<5	mg
Factor Scale non-linearity	<500	<500	<500	<1000	<1000	<2000	ppm
Factor Scale Month Repeatability	<300	<100	<30	<300	<300	<300	ppm
Factor Scale Temp Coefficient	10	10	10	10	10	10	ppm/℃
Class II Non-linearity Coefficient	<100	<100	<100	<100	<100	<100	μg/g2
Resolution	5	5	10	10	25	50	μg
Start Time	<1	<1	<1	<1	<1	<1	s
Sampling Rate	1500	1500	1500	1500	1500	1500	Hz
Shock(charged)	10000	10000	10000	10000	10000	10000	g
Shock(uncharged)	10000	10000	10000	10000	10000	10000	g
Operation Temp	-45—+85						℃
Voltage	5±0.25	5±0.25	5±0.25	5±0.25	5±0.25	5±0.25	V
Current	<15	<15	<15	<15	<15	<15	mA
Interface	SPI	SPI	SPI	SPI	SPI	SPI	SPI